13

Realizing Deep-Submicron Gap Spacing for CMOS-MEMS Resonators

Year:
2012
Language:
english
File:
PDF, 2.16 MB
english, 2012
33

Analogy among microfluidics, micromechanics, and microelectronics

Year:
2013
Language:
english
File:
PDF, 1.01 MB
english, 2013
37

High-stiffness driven micromechanical resonators with enhanced power handling

Year:
2012
Language:
english
File:
PDF, 1.34 MB
english, 2012